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VOL. 12, ISSUE 4 (2025)
A comprehensive review of SOI-CMOS and FINFET technologies in modern VLSI design
Authors
Dr. Lokeshwar Patel, Subodh Dewangan
Abstract
Silicon-On-Insulator (SOI) technology, once envisioned as a futuristic innovation, has now solidified its position as a leading solution for designing low-voltage integrated circuits. Significant advances in the fabrication of single-crystal SOI substrates have paved the way for the production of high-performance devices. Over the past decade, SOI MOSFETs have demonstrated exceptional capabilities across high-frequency applications, including the use of high-K/metal gate materials, VLSI systems, analog and digital ICs, and mixed-signal platforms. The advantages of SOI include gate length scaling down to 22 nm, improved leakage current suppression, and immunity from latch-up effects. This review explores SOI technology in conjunction with MOSFET architectures, analyzing fabrication methods, performance benefits, key challenges, and the future trajectory of both SOI-MOS and FinFET device technologies.
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Pages:72-81
How to cite this article:
Dr. Lokeshwar Patel, Subodh Dewangan "A comprehensive review of SOI-CMOS and FINFET technologies in modern VLSI design". International Journal of Multidisciplinary Research and Development, Vol 12, Issue 4, 2025, Pages 72-81
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